JPH0332353U - - Google Patents
Info
- Publication number
- JPH0332353U JPH0332353U JP9311289U JP9311289U JPH0332353U JP H0332353 U JPH0332353 U JP H0332353U JP 9311289 U JP9311289 U JP 9311289U JP 9311289 U JP9311289 U JP 9311289U JP H0332353 U JPH0332353 U JP H0332353U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- ion source
- scanner
- supporting
- manufacturing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 5
- 150000002500 ions Chemical class 0.000 claims 4
- 238000010884 ion-beam technique Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9311289U JPH0332353U (en]) | 1989-08-08 | 1989-08-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9311289U JPH0332353U (en]) | 1989-08-08 | 1989-08-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0332353U true JPH0332353U (en]) | 1991-03-28 |
Family
ID=31642511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9311289U Pending JPH0332353U (en]) | 1989-08-08 | 1989-08-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0332353U (en]) |
-
1989
- 1989-08-08 JP JP9311289U patent/JPH0332353U/ja active Pending
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